A.P. Thomas Construction, Inc. constructed a 35,000 square foot ISO Class 3 clean room for a semiconductor foundry for General Dynamics and the Department of Defense – DMEA. This project was a coordinated effort with the designer, Jacobs Engineering, which included a central utility plant and backup power system that required close attention to detail and a high-level technical review. All key trades used Building Information Modeling (BIM) to foresee potential issues in the field and to be able to eliminate clashes by adjusting the design.
Specific highlights and features of the facility include:
- Three 30,000 CFM clean room air handlers.
- 1,400-ton multi-stack chiller and one 1,400-ton crossflow cooling tower.
- One 60-ton CUP air conditioning unit, 84 cleanroom sensible cooling coils.
- 904 ultra-HEPA fan filter units.
- Emergency power system including one 1,000K diesel generator with automatic transfer switch and three flywheel / UPS systems.
- Ultra-pure water treatment system.
- Ultra-high purity and general purity stainless-steel gas piping systems for argon, helium, hydrogen, nitrogen, and oxygen gases.
- FRP centrifugal exhaust fans.
- Acid exhaust distribution, including 33,000 CFM packed bed exhaust scrubber.
- Ammonia exhaust distribution, including a 2,800 SFM packed bed exhaust scrubber.
- VOC exhaust distribution and VOC abatement system.
- Two process vacuum pumps and stainless-steel vacuum piping system.
- Two water-cooled high-volume rotary screw compressors and stainless-steel piping system.
- Facility lightning protection system.
- Hazardous production material monitoring and SCADA control systems.
- Leak detection system.
- Early warning smoke detection system.
- Hydrofluoric acid, dilute copper, solvent and industrial wastewater lift stations, and double containment piping system.
- Industrial wastewater treatment system, including sulfuric acid and sodium hydroxide metering pumps.
- Cleanroom gel gasketed ceilings, cleanroom access flooring, cleanroom partitions, vertical and horizontal air barriers.
- Development and implantation of clean room protocols for material handling, gowning, continuous cleaning, super clean, and validation testing.
